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Vacuum/Thin Film Techniques

Learning Objectives:
  1. To understand vacuum technology fundamentals
  2. To understand the hazards associated with vacuum systems and practice proper safety procedures
  3. To understand and be able to implement vacuum measurements techniques
  4. To be able to disassemble and reassemble vacuum systems
  5. To be able to leak check, diagnose, and repair vacuum systems
  6. To gain a working familiarity with various vacuum systems and techniques

The class will broken up into teams which will rotate through the activities for days 2-4

  Day 1 Day 2 Day 3 Day 4 Day 5
AM Meyer Hall 275&247 Orientation, Fundamentals, Rotary Vane pump Meyer Hall 275&247 Gas Flow Measurement Meyer Hall 275&247 Residual Gas Analysis Meyer Hall 275&247 Thin Film Deposition Meyer Hall 275&247 Lab Report
PM Meyer Hall 275&247 Vacuum Fundamentals and Techniques Meyer Hall 275&247 Gas Flow Measurement Meyer Hall 275&247 Residual Gas Analysis Meyer Hall 275&247 Thin Film Deposition Meyer Hall 275&247 Lab Report





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Last Modified: April 27, 2003