Lab Procedures


RCA Clean
Photolithography Procedure
Setting up the Spinner
Dry Oxidation
Wet Oxidation
Plasma Etching Procedure
Buffered Oxide Etch (BOE)
Thermal Evaporation
Spin-on Dopant or Glass (SOD or SOG)
Ellipsometry
Sheet Resistance
Profilometry
Current Voltage Characterization (IV)
Capacitance Voltage Characterization (CV)