Cleaning Station Thermal
Processing Photoresist
Spinners Programmable
Hot Plate Cobilt
Mask Aligner March
Instruments Plasma Etcher Rapid
Thermal Processing EvaporatorProcessing Tools
Cleaning Station
Thermal
Processing
Photoresist
Spinners
Programmable
Hot Plate
Cobilt
Mask Aligner
March
Instruments Plasma Etcher
Rapid
Thermal Processing
Evaporator
Characterization Equipment
Micromanipultor
Probe Station and Curver Tracer
Capacitance
Voltage Meter
Ellipsometer
Profilometer
4-point
Probe
Data Sheets
Shipley
1813 Photoresist
P8545
Spin on Dopant (Phosphorus Dopant)
B150
Spin on Dopant (Boron Dopant)
P5
Spin on Dopant (Phosphorus Dopant)
Link
to Emulsitone page with other Spin-on dopants
First
aid for HF
Calibration results
Wet
and dry oxide thickness from 950-1100C and 1 hour growth
