B150 - diffusion depth and sheet resistance vs temperature during pre-dep from the manufacturer's data sheet
30 minute diffusions
Diffusion Temp in degrees C
Sheet Resistance in ohms/square
Diffusion Depth in Microns
900
143
0.4
920
93
0.4
930
78
0.5
940
72
0.6
950
65
.7
1050
14
1.5
1100
6.4
2.6
1150
3.0
4.2
1200
1.8
6.5
1250
1.7
10.3
This page last updated April 23, 2002