P5 - diffusion depth and sheet resistance vs temperature during pre-dep from the manufacturer's data sheet
30 minute diffusions
Diffusion Temp in degrees C
Sheet Resistance in ohms/square
Diffusion Depth in Microns
950
342.5
0.4
1000
122.6
0.7
1050
54.6
0.9
1100
26.9
1.8
1150
16.5
2.3
1200
11.4
3.8
This page last updated April 23, 2002