P8545 - diffusion depth and sheet resistance vs temperature during pre-dep from the manufacturer's data sheet
30 minute diffusions
Diffusion Temp in degrees C
Sheet Resistance in ohms/square
Diffusion Depth in Microns
900
23
0.9
950
12
1.1
1000
6.8
2.1
1050
5.5
2.4
1100
4.0
3.3
1150
3.3
4.0
1200
2.6
4.5
1250
2.3
8.2
This page last updated April 23, 2002