PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Syllabus
- Text, topics
- Exams, Grading, etc.
Lectures
- 1:00 - 2:30 on Thursdays (and next Tuesday)
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Laboratory
- Four 5-person interdisciplinary teams
- Three, 4-week Modules
- Procedures, Tools, and Process Optimization
- Device Fabrication I - Structured
- Device Fabrication II - Unstructured