PPT Slide

CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory

Devices - Solar Cell

Basic Process Steps

1. p-type silicon substrate

2. Spin on glass (SOG):phosphorous

3. Prediffusion anneal

4. Strip SOG

5. Drive in O2 ambient to

simultaneously grow oxide

6. Metallize front

7. Pattern contacts and etch

8. Metallize Back