PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
1. Metallurgical Grade Silicon (MGS) 98% Pure
2. Formation of trichlorosilane (SiHCl3)
3. Distillation: SiHCl3 boils at 31.8 ºC
4. Back to Silicon - Electronic Grade (EGS)
SiO2(s) + 2C(s) ® Si(l) + CO(g)
Si(s) + HCl(g) ® SiHCl3(g) + other compounds
Purification Step - 99.999999%
2SiHCl3(g) + 2H2(g) ® 2Si(s) + 6HCl(g)