PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Czochralski Growth (CZ)
- Single Crystal Material
- Relatively simple
- Slow pull rate ~ 1 foot/day
Heat Transfer Problem
- Latent Heat = Heat Losses
- Larger diameter - slower rate
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Final Product Ingot
- ~ 5 foot, 250#
- 650 wafers/ingot
- ~$15,000