PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
All About Yield
- The number no one will tell you
- 80% - your rich, 60% your bankrupt
- 50% of losses due to contamination
- Almost 1/2 of a fab dedicated to utilities
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Clean Room
- Class 10, 100, 1000? < # particulates/ft3
- HEPA: High Efficiency Particulate Air filter
- Where does dust come from? Equipment, materials, people
- Large air recirculation
- Humidity Control - Either for wafers or for people
Ultrapure Water (UPW)
- 2000 gallons/wafer
- Filtration, reverse osmosis, UV light treatment, ~ 50 % efficient
- Test by measuring resistivity