PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Advantages - Chemistry
- Water rinse - high purity
- Wide range of chemistries available - different solutes
- (Relatively) Low cost
- Good selectivity - doesn’t effect underlying material
Advantages - Safety and environmental
- Low flammability
- (Relatively) low cost to treat/dispose
- Generally low vapor pressure up - worker exposure
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Disadvantages
- Low vapor pressure - Drying/recontamination an issue
- Not compatible with vacuum systems
- Dangerous if contacted with skin
- Large volumes of solution needed