PPT Slide

CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory

Contaminants

Materials
• Metals
• Oxides
• Oil
• Photresist

Physical Form
• Film
• Discontinuous film
• Particulates
• Lone atoms or clusters

Silicon

Silicon Dioxide

Water

Gases, Organics, Metals, Stuff

Contaminated

Surface

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