PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Equipment
- Cutting Oils
- Lubricants
- Coolants
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People
- Particles - Airborne
- Oils
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Processing
- Organic residues after solvent use.
- Inorganic deposits after aqueous processing
- Particles and metals < 1 ppb
- CMP - particles