PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Chemical Absorption or Chemisorption
- Covalent, Ionic, or Metallic Bond
- Strong bond > 1 eV (23 kcal/mol)
- Requires reaction before removal (e. g. oxidation, chlorination, reduction)
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Physical Adsorption
- van der Waals or H bonding
- Weak < 0.5 eV, water rinsing can break
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Other forces/considerations
- Gravity
- Electrostatic
- Microscale
- Porous/rough/smooth/etc.