PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Solutions
- Light: RCA 1 - (NH4OH ,H2O2, H2O)
- Heavy: Piranha - (H2SO4, H2O2)
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Mechanism
- Oxidize organic constituents to form water soluble species like
carboxylic acids (-COOH)
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Characteristics
- Often requires elevated temperatures (75 -130 ºC) for high activity
- Increases initial reactivity, but decomposes H2O2(fresh solutions)
- H2SO4 very viscous - requires extensive rinsing
- Impurities from process removed by HF dip, DI water rinse