PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Solutions
- Light: RCA 1 - (NH4OH ,H2O2, H2O)
- Heavy: RCA 2 - (HCl, H2O2, H2O)
-
Mechanism
- Metal ions (Lewis acid) accepts electron density from anion in solution (OH-, Cl-) (Lewis Base) to form inorganic compound that is soluble in water
-
Characteristics
- RCA 1 solubilizes group IB, IIB, Au, Ag, Cu, Ni, Cd, Co, and Cr
- RCA 2 solubilizes Al, Fe, Mg, Zn by forming salts and hydroxides