PPT Slide
CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory
Increasing Temperature
- Rule of thumb: Increase of 10 ºC generally doubles rate
- Increasing T increases solubility
- Increase decomposition of volatile reactants
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Ratio of Chemicals
- Generally tradeoff between rate and selectivity
- pH strongly influences solubility
- Evaporation can significantly alter composition
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RCA Clean Developed in 1970 - Huang
- RCA 1: T = 75 - 80 ºC • UPW rinse
- Oxide Strip • N2 Dry - Critical Step
- RCA 2: T = 75 - 80 ºC