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CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory

Deal-Grove Model (1965)

Gas

SiO2

Si

CB

Co

Cs

Ci

d

xox

Definitions

CB = Gas concentration in bulk

Cs = Gas concentration at surface

Co = Solid concentration at surface

Ci = Solid concentration at interface

xox = Oxide thickness

hg = Mass transfer coefficient

Dg = Diffusivity in gas-phase

Dox = Diffusivity in oxide

Henry’s Law

Co = KHCS

hg

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