PPT Slide

CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory

Linear - Parabolic Model

where

A, B are Rate Constants

• A has units [mm]

• B has units [mm2/hr] - Parabolic

rate constant

• B/A has units [mm/hr] - Linear

Rate Constant

A, B are strong functions of

• Temperature

• Ambient (wet or dry)

A, B are weak functions of

• Orientation

• Doping (both type and level)

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