PPT Slide

CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory

How to measure n, p?

Hall Effect:

Force:
• F = q (v x B)
• Holes, electrons move in
  opposite directions
• Force in same direction
• Measure Field in z direction (Ez)

Carrier Density =

Scattering Mechanisms
• Lattice vibrations, increase w/Temp
• Impurities, decrease w/ /Temp

Ix

Ix

By

Ez

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