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CHEN435/PHGN435: Interdisciplinary Silicon Processing Laboratory

Capacitor

+Q

-Q

Va

Vb

d

Permittivity = e = keo

eo = 8.85x10-12 C2 N-1 m-2

k = Dielectric Constant

k (SiO2) ~ 4

+

+

+

+

+

+

+

-

-

-

-

-

-

-

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