Units - Conventions

• Pressure

  • 1 atm = 760 torr = 101325 Pa = 14.7 psi = 33.9 feet of water
  • 1 mTorr = 10-3 torr ; 100 Pa = 0.75 torr = 1 mbar

• Gas Flow:

  • [Pressure x Volume/Time]: scfm, slm, sccm, torr-L/s
  • 1 scfm = 28.317 slm; 1000 sccm = 1 slm

• Gas Constant

  • R = 8.314 m3*Pa/mol*K = 82.06 cm3*atm/mol*K

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