Instrumentation

• Pressure

  • Direct Gauges: Sense Force
  • Indirect Gauges I: (low vacuum) Energy Transfer
  • Indirect Gauges II: (hi Vacuum) Ionization

• Temperature

  • RTD, Thermocouples, Thermistor, Pyrometry
  • Sheath, unsheathed, wire size, response time
  • Substrate Temperatures

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