Summary

• Vacuum: Gas kinetic theory, transport

  • Mean Speed, Flux, l, DAB
  • Throughput, pumping speed, conductance, DP

• Pumps

  • Medium (P > 10-4): Rotary vane, roots blower, dry pumps
  • Hi (10-4 < P < 10-8) : Diffusion, Turbos, Cryo Pumps
  • UHV (P < 10-8): Ti sublimation, pumps, ion pumps

• Systems

  • Materials of construction, characterization using RGA
  • Metal-metal (Conflat) or elastomer (o-ring, kwik flange)

• Instrumentation: pressure, temp, flow, feedthrus

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