MEASURING THICKNESS USING ELLIPSOMETER
Preliminary Procedures
Version 1.0


IMPORTANT: Latex gloves MUST be worn at all times when handling wafers.




A. Turn on Ellipsometer by fully turning key clockwise
B. Place pre-calibrated sample on tray
C. Adjust eyepiece in/out to focus larger cross hairs
D. Adjust up/left/right knobs to make small cross hairs intersect big cross hairs
E. Maximize signal by opening/closing attenuator so signal is not overloaded and change height
F. Switch to "A" setting from manual
G. On computer open Ellipsometer file
H. Run Standard program from computer (STD)
I. Run "SPECIP", then "6328" Ne-He, then "OXIDE" setting
J. Sample should be about 900 angstroms
K. Measure samples by running "OXIDE"
L. Turn off
M. Sign name into log book