MEASURING THICKNESS USING SURFACE PROFILER

IMPORTANT: Latex gloves MUST be worn at all times when handling wafers

1. Load recipe (CHEN435) from database.
2. Enter X/Y screen.
3. At unload position, open door and place wafer in designed location.
4. Press Load button on X/Y screen.
5. Press Focus button on X/Y screen.
6. Move cross hair by pressing the arrow keys on the X/Y screen.

Note: the arrows appear to go in the opposite direction than expected.

7. Once scanning location is selected, press start button.
8. When scan is finished level it by selecting level and placing two level bars on the same height location. Deselect level button.
9. Measure the height difference by moving measurement bars to cover the high and low ends.

Note: It is best to elongate the measurement bars to take an average measurement over the range.

10. Save the file to \scan data\CHEN435\group *.
11. Quit the profile screen and enter X/Y screen again. Unload the sample.
12. Take the sample out only when the sample plate moved near the door.
13. Sign name into log book.