ABM UV Mask Aligner

ABM UV Mask Aligner

fume hoods in cleanroom

Location

CoorsTek 040

Contact

Alex Dixon – agdixon@mines.edu

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Instrument Details

The ABM mask aligner features an intensity-controlled 6″x6″ illumination area, strong illumination at both 400 and 350, two simultaneous operating alignment cameras, auto-leveling sample mount, micrometer adjustments, and semiautomatic operation. It is currently set up for use with 4″ masks and <1″ samples but adjustments can be made upon request.