FEI Helios Nanolab 600I FIB/SEM
FEI HELIOS NANOLAB 600I FIB/SEM
Location
CoorsTek 001-J
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Instrument Details
The Helios NanoLab 600i is a SEM/FIB DualBeam workstation with a Ga ion column for imaging and sample milling and Pt deposition (GIS) capability. Nanoscale chemical analysis may be performed with an EDAX energy dispersive X-ray spectroscopy (EDS) system. The instrument is also outfitted with an electron backscattered diffraction (EBSD) system, which allows for crystallographic determination on the nanoscale, and, along with imaging capabilities, 3-D reconstructions of the material composition and crystallography. In situ manipulation for TEM foil extraction is performed using an Omniprobe Autoprobe 200 nano-manipulator, with 10 nm positioning resolution.
- Schottky Field Emission Cathode
- Resolution: 0.9 nm at 15 kV (at eucentric WD); 1.4 nm at 1 kV (at optimum WD)
- Ga Source Focused Ion Beam (FIB) – 0.5 kV to 30 kV
- Platinum Deposition (GIS) System
- Secondary (SEI) and Backscatter (BEI) Imaging
- In-lens SE detector (TLD-SE)
- In-lens BSE detector (TLD-BSE)
- Everhardt-Thornley SE
- Solid-state BF and DF STEM detector
- AutoFIB, AutoTEM, Slice and View, and EBS3 Software
- EDAX “Octane Super” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
- EDAX “Hikari Super” 1400pps Electron Backscatter Diffraction (EBSD) detector
- EDAX TEAM software
- Omniprobe Autoprobe™ 200 Nano-manipulator
Specimen Prep Capabilities in the Electron Microscopy Lab
GENERAL
- Slow Speed Diamond Saws
- EVACTRON CombiClean Decontaminator
SEM
- JEOL IB-0910CP Cross-Section Polisher
- Hummer IV Sputtering System (Au/C Coater)
TEM
- 3mm Foil Punch
- South Bay Model 350 3mm TEM Disk Cutter
- Gatan Model 600 Duo Mill Ar ion mill
- Fischione Electropolishing System