FEI Helios Nanolab 600I FIB/SEM

FEI HELIOS NANOLAB 600I FIB/SEM

fei helios nanolab in use

Location

CoorsTek 001-J

Contact

David Diercks – ddiercks@mines.edu

 

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Instrument Details

The Helios NanoLab 600i is a SEM/FIB DualBeam workstation with a Ga ion column for imaging and sample milling and Pt deposition (GIS) capability. Nanoscale chemical analysis may be performed with an EDAX energy dispersive X-ray spectroscopy (EDS) system. The instrument is also outfitted with an electron backscattered diffraction (EBSD) system, which allows for crystallographic determination on the nanoscale, and, along with imaging capabilities, 3-D reconstructions of the material composition and crystallography. In situ manipulation for TEM foil extraction is performed using an Omniprobe Autoprobe 200 nano-manipulator, with 10 nm positioning resolution.

  • Schottky Field Emission Cathode
  • Resolution: 0.9 nm at 15 kV (at eucentric WD); 1.4 nm at 1 kV (at optimum WD)
  • Ga Source Focused Ion Beam (FIB) – 0.5 kV to 30 kV
  • Platinum Deposition (GIS) System
  • Secondary (SEI) and Backscatter (BEI) Imaging
    • In-lens SE detector (TLD-SE)
    • In-lens BSE detector (TLD-BSE)
    • Everhardt-Thornley SE
    • Solid-state BF and DF STEM detector
  • AutoFIB, AutoTEM, Slice and View, and EBS3 Software
  • EDAX “Octane Super” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
  • EDAX “Hikari Super” 1400pps Electron Backscatter Diffraction (EBSD) detector
  • EDAX TEAM software
  • Omniprobe Autoprobe™ 200 Nano-manipulator
Specimen Prep Capabilities in the Electron Microscopy Lab

GENERAL

  • Slow Speed Diamond Saws
  • EVACTRON CombiClean Decontaminator

SEM

  • JEOL IB-0910CP Cross-Section Polisher
  • Hummer IV Sputtering System (Au/C Coater)

TEM

  • 3mm Foil Punch
  • South Bay Model 350 3mm TEM Disk Cutter
  • Gatan Model 600 Duo Mill Ar ion mill
  • Fischione Electropolishing System