Karl Suss Mask Aligner

Karl Suss Mask Aligner

fume hoods in cleanroom

Location

Hill Hall 312

Contact

Alex Dixon – agdixon@mines.edu

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INSTRUMENT DETAILS

Karl Suss MJB3 UV400 Mask Aligner is an instrument enabling photolithography, which is a microfabrication process used to selectively remove parts of a thin film to create a pattern or a design onto a substrate by means of UV lamp. It fits substrates up to 6″ x 6″ and exposes with a UV400nm source at 250W.