Semicore Sputtering System
SEMICORE SPUTTERING SYSTEM
Location
Hill Hall 310 & CoorsTek 040
Contact
Alex Dixon – agdixon@mines.edu
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Instrument Details
The Semicore is a 3-gun magnetron DC sputtering system with a sputter-down configuration for the deposition of high melting point metals. The system has the capability to do subsequent layered deposition of multiple metals.