Semicore Sputtering System

SEMICORE SPUTTERING SYSTEM

FEI TALOS F200X TEM/STEM

Location

Hill Hall 310 & CoorsTek 040

Contact

Alex Dixon – agdixon@mines.edu

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Instrument Details

The Semicore is a 3-gun magnetron DC sputtering system with a sputter-down configuration for the deposition of high melting point metals. The system has the capability to do subsequent layered deposition of multiple metals.