AJA Sputtering System

AJA SPUTTERING SYSTEM

FEI TALOS F200X TEM/STEM

Location

Hill Hall 310 & CoorsTek 040

Contact

Alex Dixon – agdixon@mines.edu

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Instrument Details

The AJA is a 4-gun magnetron sputtering system with a sputter-up configuration. The system has the capability to perform RF sputtering deposition for the deposition of ceramic materials, is configured to deposit magnetic materials, and can sputter multiple materials simultaneously.