FEI Quanta 600I Environmental SEM

Instrument Details

The Quanta SEM has operating vacuum modes to deal with different types of samples. High Vacuum (HiVac) is the conventional operating mode associated with all scanning electron microscopes. The two other application modes are Low Vacuum (LowVac) and ESEM. In these modes the specimen chamber is at a pressure range of 0.1 to 30 Torr (15 to 4000 Pa). Either mode can use water vapor from a built-in water reservoir, or auxiliary gas supplied by the user.  Observation of outgassing or highly charging materials can be made using one of these modes without the need to metal coat the sample.

• Tungsten Cathode
• Secondary (SEI) and Backscatter (BEI) Imaging
• Three modes of operation:
  1. High Vacuum (10^-6 torr)
  2. Low vacuum (0.1 – 1.0 torr)
  3. ESEM (1.0 – 10 torr)
• EDAX “Element” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
• Large Sample Chamber
• Hot Stages (rated to 1500°C)
• Peltier Cold Stage